Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8019046 | Apparatus for generating shortwave radiation | James H. Underwood | 2011-09-13 |
| 6864490 | Reflectometer device | James H. Underwood, Phillip J. Batson | 2005-03-08 |
| 6738135 | System for inspecting EUV lithography masks | James H. Underwood, Patrick P. Naulleau | 2004-05-18 |