SE

Shawn D. Eggum

EN Entegris: 21 patents #17 of 643Top 3%
FL Fluoroware: 4 patents #8 of 68Top 15%
Overall (All Time): #158,996 of 4,157,543Top 4%
25
Patents All Time

Issued Patents All Time

Showing 1–25 of 25 patents

Patent #TitleCo-InventorsDate
12315749 Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container Matthew A. Fuller, Mark V. Smith 2025-05-27
12140860 Reticle pod with window Anthony Mathius Tieben, Brian M. Wiseman, Russ V. Raschke, Huaping Wang 2024-11-12
12062560 Reticle pod having side containment of reticle Russ V. Raschke, Barry Gregerson 2024-08-13
11914287 Container for holding and transporting reticles having a transparent window assembly Russ V. Raschke 2024-02-27
11594437 Reticle pod having side containment of reticle Russ V. Raschke, Barry L. Gregeron 2023-02-28
11551957 Purge connectors and modules for a substrate container Mark V. Smith, Matthew A. Fuller 2023-01-10
8734698 Composite substrate carrier Sanjiv Bhatt 2014-05-27
7168564 Composite substrate carrier Sanjiv Bhatt 2007-01-30
7168587 Wafer carrier door and spring biased latching mechanism 2007-01-30
7131176 Wafer support attachment for a semi-conductor wafer transport container 2006-11-07
7115335 Connector assembly for fluid transfer 2006-10-03
6955382 Wafer carrier door and latching mechanism with c-shaped cam follower 2005-10-18
6951284 Wafer carrier with wafer retaining system Shawn Cheesman 2005-10-04
6880718 Wafer carrier door and spring biased latching mechanism 2005-04-19
6871741 Composite substrate carrier Sanjiv Bhatt 2005-03-29
6848578 Wafer enclosure sealing arrangement for wafer containers 2005-02-01
6811029 Wafer support attachment for a semi-conductor wafer transport container 2004-11-02
6808668 Process for fabricating composite substrate carrier Sanjiv Bhatt 2004-10-26
6749067 Wafer carrier door with form fitting mechanism cover 2004-06-15
6712213 Wafer carrier door and latching mechanism withhourglass shaped key slot 2004-03-30
6428729 Composite substrate carrier Sanjiv Bhatt 2002-08-06
6164530 Disk carrier with transponder Nicholas Cheesebrow, Robert D. Kos, Randy Williams 2000-12-26
6039186 Composite transport carrier Sanjiv Bhatt, Wayne C. Olson 2000-03-21
5248033 Hinged tilt box with inclined portion Robert D. Kos, Tracy J. Niebeling 1993-09-28
5123681 Latch for wafer storage box for manual or robot operation Robert D. Kos, Tracy J. Niebeling 1992-06-23