| 12140860 |
Reticle pod with window |
Shawn D. Eggum, Brian M. Wiseman, Russ V. Raschke, Huaping Wang |
2024-11-12 |
| 10784135 |
Substrate container with improved substrate retainer and door latch assist mechanism |
Christopher Strickhouser |
2020-09-22 |
| 9745119 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Matthew Kusz, David L. Halbmaier, John Lystad |
2017-08-29 |
| 8727125 |
Substrate container with fluid-sealing flow passageway |
John Lystad, David L. Halbmaier |
2014-05-20 |
| 8613359 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Matthew Kusz, Christian Andersen, Huaping Wang +4 more |
2013-12-24 |
| 8276759 |
Front opening wafer carrier with path to ground effectuated by door |
Gregory Bores, Suraj Kalia |
2012-10-02 |
| 8231005 |
Reticle pod |
Steven P. Kolbow, Kevin McMullen, Matthew Kusz, Christian Andersen, Huaping Wang +4 more |
2012-07-31 |
| 8146623 |
Purge system for a substrate container |
David L. Halbmeier, Steven P. Kolbow |
2012-04-03 |
| 7886910 |
Front opening wafer carrier with path to ground effectuated by door |
Gregory Bores, Suraj Kalia |
2011-02-15 |
| 7607543 |
Reticle pod with isolation system |
Barry Gregerson, David L. Halbmaier, Stephen Sumner, Brian Wiseman, Justin Strike |
2009-10-27 |
| 7578407 |
Wafer container with sealable door |
John Lystad |
2009-08-25 |
| 7528936 |
Substrate container with pressure equalization |
Barry Gregerson, David L. Halbmaier, Stephen Sumner, Brian Wiseman, Justin Strike |
2009-05-05 |
| 7328727 |
Substrate container with fluid-sealing flow passageway |
John Lystad, David L. Halbmaier |
2008-02-12 |