MF

Matthew A. Fuller

EN Entegris: 41 patents #3 of 643Top 1%
Overall (All Time): #71,891 of 4,157,543Top 2%
42
Patents All Time

Issued Patents All Time

Showing 25 most recent of 42 patents

Patent #TitleCo-InventorsDate
12394652 Semiconductor substrate carrying container with front and rear openings Jeffery J. King 2025-08-19
12354897 Substrate container with door gasket Aaron Vestal 2025-07-08
12322625 Wafer container purge port assembly Wei-Sheng Hsu, Kobold Yang, Colton J. Harr 2025-06-03
12315749 Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container Shawn D. Eggum, Mark V. Smith 2025-05-27
12255084 Handle for wafer carrier Jason T. Steffens, Mark V. Smith 2025-03-18
12068183 Substrate container with door gasket Aaron Vestal, Christopher Strickhouser 2024-08-20
11901205 Membrane diffuser for a substrate container Mark V. Smith, Nicholas Thelen, Michael C. Zabka, Sung In Moon, John P. Puglia 2024-02-13
11869787 Substrate container valve assemblies Mark V. Smith, Jeffery J. King, John Burns 2024-01-09
11610795 Membrane diffuser for a substrate container Mark V. Smith, Nicholas Thelen, Michael C. Zabka, Sung In Moon, John P. Puglia 2023-03-21
11587810 Wafer cushion Colton J. Harr 2023-02-21
11551957 Purge connectors and modules for a substrate container Shawn D. Eggum, Mark V. Smith 2023-01-10
10872795 Substrate cushion brace retainer Colton J. Harr 2020-12-22
10734264 Wafer container with external passive getter module Jeffrey J. King, John Burns, Martin L. Forbes 2020-08-04
10723525 Wafer container with latching mechanism for large diameter wafers Barry Gregerson 2020-07-28
10672637 Internal purge diffuser with offset manifold Kyle Patrick Glavan, Jeffery J. King 2020-06-02
10475682 Wafer support column with interlocking features Colton J. Harr 2019-11-12
10173812 Wafer container with latching mechanism for large diameter wafers Barry Gregerson 2019-01-08
10147624 Wafer carrier Michael S. Adams, Barry Gregerson 2018-12-04
10043696 Wafer container with tubular environmental control components James A. Watson, John Burns, Martin L. Forbes, Mark V. Smith 2018-08-07
10032660 Porous barrier for evenly distributed purge gas in a microenvironment John Burns, Mark V. Smith 2018-07-24
9673075 Wafer container with door guide and seal Barry Gregerson, Michael S. Adams 2017-06-06
9520310 Wafer container with door interface seal Barry Gregerson 2016-12-13
9343345 Replaceable wafer support backstop John Burns 2016-05-17
9312157 Wafer carrier Michael S. Adams, Barry Gregerson 2016-04-12
9054144 Porous barrier for evenly distributed purge gas in a microenvironment John Burns, Mark V. Smith 2015-06-09