| 12498225 |
Chain |
Samuel A. Shapero, Matthew Lashley, Daniel Levy |
2025-12-16 |
|
| 12315749 |
Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container |
Matthew A. Fuller, Shawn D. Eggum |
2025-05-27 |
|
| 12255084 |
Handle for wafer carrier |
Jason T. Steffens, Matthew A. Fuller |
2025-03-18 |
|
| 11901205 |
Membrane diffuser for a substrate container |
Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia |
2024-02-13 |
$92,919,000 |
| 11869787 |
Substrate container valve assemblies |
Matthew A. Fuller, Jeffery J. King, John Burns |
2024-01-09 |
$78,244,000 |
| 11610795 |
Membrane diffuser for a substrate container |
Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia |
2023-03-21 |
$126,052,000 |
| 11551957 |
Purge connectors and modules for a substrate container |
Shawn D. Eggum, Matthew A. Fuller |
2023-01-10 |
$121,881,000 |
| 11398395 |
Substrate container with latching mechanism having two cam profiles |
Christopher Strickhouser |
2022-07-26 |
$65,328,000 |
| 10347517 |
Towers for substrate carriers |
Christopher Beatty, Murali Bandreddi |
2019-07-09 |
$11,952,000 |
| 10043696 |
Wafer container with tubular environmental control components |
James A. Watson, John Burns, Martin L. Forbes, Matthew A. Fuller |
2018-08-07 |
$11,118,000 |
| 10032660 |
Porous barrier for evenly distributed purge gas in a microenvironment |
John Burns, Matthew A. Fuller |
2018-07-24 |
$10,806,000 |
| 9997388 |
Substrate container with purge ports |
John Burns |
2018-06-12 |
$9,389,000 |
| 9054144 |
Porous barrier for evenly distributed purge gas in a microenvironment |
John Burns, Matthew A. Fuller |
2015-06-09 |
$10,156,000 |
| 8783463 |
Wafer container with tubular environmental control components |
James A. Watson, John Burns, Martin L. Forbes, Matthew A. Fuller |
2014-07-22 |
$8,598,000 |
| D673853 |
Substrate shipper component |
John Burns, Eric Stephen Olson, Russ V. Raschke, Michael S. Adams |
2013-01-08 |
|
| D664851 |
Substrate shipper component |
John Burns, Eric Stephen Olson, Russ V. Raschke, Michael S. Adams |
2012-08-07 |
|
| 7900776 |
Wafer container with door actuated wafer restraint |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2011-03-08 |
$12,954,000 |
| 7866480 |
Front opening substrate container with bottom plate |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2011-01-11 |
$6,124,000 |
| 7857683 |
CMP retaining ring |
John Burns, Martin L. Forbes, Matthew A. Fuller, Jeffery J. King |
2010-12-28 |
$12,324,000 |
| 7677393 |
Wafer container and door with vibration dampening latching mechanism |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2010-03-16 |
$13,066,000 |
| D611437 |
Wafer carrier door |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2010-03-09 |
|
| 7523830 |
Wafer container with secondary wafer restraint system |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2009-04-28 |
$3,770,000 |
| 7422107 |
Kinematic coupling with textured contact surfaces |
John Burns, Martin L. Forbes, Matthew A. Fuller, Jeffery J. King |
2008-09-09 |
$4,865,000 |
| 7347329 |
Substrate carrier |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes, Michael C. Zabka |
2008-03-25 |
$3,624,000 |
| 7344030 |
Wafer carrier with apertured door for cleaning |
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes |
2008-03-18 |
$3,317,000 |
