MS

Mark V. Smith

EN Entegris: 30 patents #7 of 643Top 2%
AL Asyst Technologies L.L.C.: 2 patents #29 of 93Top 35%
Cypress Semiconductor: 2 patents #733 of 1,852Top 40%
SI Semifab Incorporated: 1 patents #7 of 12Top 60%
UI University Of Illinois: 1 patents #1,166 of 3,009Top 40%
Overall (All Time): #88,121 of 4,157,543Top 3%
37
Patents All Time

Issued Patents All Time

Showing 25 most recent of 37 patents

Patent #TitleCo-InventorsDate
12315749 Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container Matthew A. Fuller, Shawn D. Eggum 2025-05-27
12255084 Handle for wafer carrier Jason T. Steffens, Matthew A. Fuller 2025-03-18
11901205 Membrane diffuser for a substrate container Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia 2024-02-13
11869787 Substrate container valve assemblies Matthew A. Fuller, Jeffery J. King, John Burns 2024-01-09
11610795 Membrane diffuser for a substrate container Nicholas Thelen, Matthew A. Fuller, Michael C. Zabka, Sung In Moon, John P. Puglia 2023-03-21
11551957 Purge connectors and modules for a substrate container Shawn D. Eggum, Matthew A. Fuller 2023-01-10
11398395 Substrate container with latching mechanism having two cam profiles Christopher Strickhouser 2022-07-26
10347517 Towers for substrate carriers Christopher Beatty, Murali Bandreddi 2019-07-09
10043696 Wafer container with tubular environmental control components James A. Watson, John Burns, Martin L. Forbes, Matthew A. Fuller 2018-08-07
10032660 Porous barrier for evenly distributed purge gas in a microenvironment John Burns, Matthew A. Fuller 2018-07-24
9997388 Substrate container with purge ports John Burns 2018-06-12
9054144 Porous barrier for evenly distributed purge gas in a microenvironment John Burns, Matthew A. Fuller 2015-06-09
8783463 Wafer container with tubular environmental control components James A. Watson, John Burns, Martin L. Forbes, Matthew A. Fuller 2014-07-22
D673853 Substrate shipper component John Burns, Eric Stephen Olson, Russ V. Raschke, Michael S. Adams 2013-01-08
D664851 Substrate shipper component John Burns, Eric Stephen Olson, Russ V. Raschke, Michael S. Adams 2012-08-07
7900776 Wafer container with door actuated wafer restraint John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2011-03-08
7866480 Front opening substrate container with bottom plate John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2011-01-11
7857683 CMP retaining ring John Burns, Martin L. Forbes, Matthew A. Fuller, Jeffery J. King 2010-12-28
7677393 Wafer container and door with vibration dampening latching mechanism John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2010-03-16
D611437 Wafer carrier door John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2010-03-09
7523830 Wafer container with secondary wafer restraint system John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2009-04-28
7422107 Kinematic coupling with textured contact surfaces John Burns, Martin L. Forbes, Matthew A. Fuller, Jeffery J. King 2008-09-09
7347329 Substrate carrier John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes, Michael C. Zabka 2008-03-25
7344030 Wafer carrier with apertured door for cleaning John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2008-03-18
7325693 Wafer container and door with cam latching mechanism John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes 2008-02-05