| 6878207 |
Gas gate for isolating regions of differing gaseous pressure |
Vincent D. Cannella |
2005-04-12 |
$8,485,000 |
| 6463874 |
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
Buddie R. Dotter, II, Timothy P. Ellison, Masatsugo Izu, Herbert C. Ovshinsky |
2002-10-15 |
$2,373,000 |
| 6209482 |
Large area microwave plasma apparatus with adaptable applicator |
— |
2001-04-03 |
$3,979,000 |
| 6186090 |
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
Buddy R. Dotter, II, Timothy P. Ellison, Masatsugo Izu, Herbert C. Ovshinsky |
2001-02-13 |
$9,161,000 |
| 6028393 |
E-beam/microwave gas jet PECVD method and apparatus for depositing and/or surface modification of thin film materials |
Masatsugu Izu, Scott Jones |
2000-02-22 |
$5,913,000 |
| 5743970 |
Photovoltaic module having an injection molded encapsulant |
Wolodymyr Czubatjy |
1998-04-28 |
$2,432,000 |
| 5374313 |
Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure |
— |
1994-12-20 |
|
| 5223308 |
Low temperature plasma enhanced CVD process within tubular members |
— |
1993-06-29 |
$1,506,000 |
| 5132652 |
Highpower microwave transmissive window assembly |
Buddie R. Dotter, II, Jeffrey M. Kirsko, Lester R. Peedin |
1992-07-21 |
|
| 5126635 |
Microwave plasma operation using a high power microwave transmissive window assembly |
Buddie R. Dotter, II, Jeffrey M. Krisko, Lester R. Peedin |
1992-06-30 |
$1,081,000 |
| 5093149 |
Method of depositing directly activated species onto a remotely located substrate |
Stephen J. Hudgens, Stanford R. Ovshinsky, Lester R. Peedin, Jeffrey M. Krisko |
1992-03-03 |
$728,000 |
| 4937094 |
Method of creating a high flux of activated species for reaction with a remotely located substrate |
Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie R. Dotter, II, Lester R. Peedin, Jeffrey M. Krisko +1 more |
1990-06-26 |
$834,000 |
| 4931756 |
High power microwave transmissive window assembly |
Buddie R. Dotter, II, Jeffrey M. Krisko, Lester R. Peedin |
1990-06-05 |
$851,000 |
| 4893584 |
Large area microwave plasma apparatus |
Jeffrey M. Krisko |
1990-01-16 |
$422,000 |
| 4883686 |
Method for the high rate plasma deposition of high quality material |
Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie Dotter II, Lester R. Peedin, Jeffrey M. Krisko +1 more |
1989-11-28 |
$715,000 |
| 4736304 |
Method and apparatus for operating one or more deposition systems |
— |
1988-04-05 |
$547,000 |
| 4729341 |
Method and apparatus for making electrophotographic devices |
Eugene Fournier, Erik J. Bjornard, Annette Johncock |
1988-03-08 |
$640,000 |
| 4664951 |
Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration |
— |
1987-05-12 |
$454,000 |
| 4626447 |
Plasma confining apparatus |
Masatsugu Izu |
1986-12-02 |
$1,148,000 |
| 4608943 |
Cathode assembly with localized profiling capabilities |
Masatsugu Izu |
1986-09-02 |
|
| 4515107 |
Apparatus for the manufacture of photovoltaic devices |
Eugene Fournier |
1985-05-07 |
|
| 4479455 |
Process gas introduction and channeling system to produce a profiled semiconductor layer |
Kevin Hoffman, Timothy D. Laarman, Gary M. DiDio, Therese McDonough |
1984-10-30 |
$1,171,000 |
| 4478173 |
Method and apparatus for sensing and controlling the intensity of energy in a deposition system |
— |
1984-10-23 |
$1,067,000 |
| 4450786 |
Grooved gas gate |
David A. Gattuso, Kevin Hoffman |
1984-05-29 |
$660,000 |
| 4440107 |
Magnetic apparatus for reducing substrate warpage |
Vincent D. Cannella, Richard O. Gray, Jr. |
1984-04-03 |
$895,000 |
