Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Large area microwave plasma apparatus

Large area microwave plasma apparatus

US Patent 4893584 · Granted Jan 16, 1990

Estimated economic value: $422,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas gate for isolating regions of differing gaseous pressure2005
Apparatus for the simultaneous deposition by physical vapor deposition and chemi2002
Large area microwave plasma apparatus with adaptable applicator2001
Apparatus for the simultaneous deposition by physical vapor deposition and chemi2001
E-beam/microwave gas jet PECVD method and apparatus for depositing and/or surfac2000
Photovoltaic module having an injection molded encapsulant1998
Magnetic roller gas gate employing transonic sweep gas flow to isolate regions o1994
Low temperature plasma enhanced CVD process within tubular members1993
Highpower microwave transmissive window assembly1992
Microwave plasma operation using a high power microwave transmissive window asse1992
Microwave plasma operation using a high power microwave transmissive window asse1992
Method of depositing directly activated species onto a remotely located substrat1992