| 5126635 |
Microwave plasma operation using a high power microwave transmissive window assembly |
Joachim Doehler, Buddie R. Dotter, II, Lester R. Peedin |
1992-06-30 |
| 5093149 |
Method of depositing directly activated species onto a remotely located substrate |
Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Lester R. Peedin |
1992-03-03 |
| 4937094 |
Method of creating a high flux of activated species for reaction with a remotely located substrate |
Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie R. Dotter, II, Lester R. Peedin +1 more |
1990-06-26 |
| 4931756 |
High power microwave transmissive window assembly |
Joachim Doehler, Buddie R. Dotter, II, Lester R. Peedin |
1990-06-05 |
| 4893584 |
Large area microwave plasma apparatus |
Joachim Doehler |
1990-01-16 |
| 4883686 |
Method for the high rate plasma deposition of high quality material |
Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie Dotter II, Lester R. Peedin +1 more |
1989-11-28 |