Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8558990 | Method of exposing a semiconductor wafer and exposure apparatus | Hisanori Ueno | 2013-10-15 |
| 7495457 | Semiconductor device evaluation method and apparatus using the same | — | 2009-02-24 |
| 7147710 | Method of manufacturing epitaxial silicon wafer | Kazuya Togashi, Kuniaki Arai, Kaori Matsumoto | 2006-12-12 |
| 6800132 | Silicon wafer and method for manufacture thereof, and method for evaluation of silicon wafer | Satoshi Komiya, Shiro Yoshino, Kouichirou Hayashida | 2004-10-05 |
| 6217650 | Epitaxial-wafer fabricating process | Takeshi Hirose, Hiroyuki Kawahara, Takeo Tamura | 2001-04-17 |