Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8558990 | Method of exposing a semiconductor wafer and exposure apparatus | Masayoshi Danbata | 2013-10-15 |
| 6610461 | Reticle having accessory pattern divided into sub-patterns | — | 2003-08-26 |
| 6399256 | Reticle having accessory pattern divided into sub-patterns | — | 2002-06-04 |