Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7576852 | Semiconductor wafer inspection device and method | Fumi Nabeshima, Hiroshi Jiken, Yoshinori Suenaga | 2009-08-18 |
| 7522290 | Apparatus and method for inspecting semiconductor wafer | Fumi Nabeshima | 2009-04-21 |
| 7147710 | Method of manufacturing epitaxial silicon wafer | Masayoshi Danbata, Kuniaki Arai, Kaori Matsumoto | 2006-12-12 |
| 4857270 | Process for manufacturing silicon-germanium alloys | Shinji Maruya, Yoshifumi Yatsurugi | 1989-08-15 |