Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7576852 | Semiconductor wafer inspection device and method | Kazuya Togashi, Hiroshi Jiken, Yoshinori Suenaga | 2009-08-18 |
| 7522290 | Apparatus and method for inspecting semiconductor wafer | Kazuya Togashi | 2009-04-21 |