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Protective film agent and processing method of workpiece |
Sho OSAWA, Yukinobu Ohura |
2025-07-22 |
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Method of manufacturing protective film agent |
Yukinobu Ohura, Hiroto Yoshida, Tomoaki Endo |
2023-04-25 |
| 11322383 |
Protective film agent for laser dicing |
Yukinobu Ohura, Hiroto Yoshida, Tomoaki Endo |
2022-05-03 |
| 11251083 |
Workpiece processing method and device chip manufacturing method |
Kenta Nakano, Hideyuki Kawaguchi, Yuki Ikeda, Toshiyuki Yoshikawa |
2022-02-15 |
| 10858524 |
Protective film forming resin agent and laser processing method |
Yukinobu Ohura, Yohei Yamashita |
2020-12-08 |
| 10354919 |
Wafer dividing method |
Tomotaka Tabuchi, Kentaro Odanaka, Satoshi Kumazawa, Yuki Ogawa |
2019-07-16 |
| 10086474 |
Protective film applying apparatus and protective film applying method |
Kenta Nakano, Yukinobu Ohura, Toshiyuki Yoshikawa |
2018-10-02 |
| 9989468 |
Fluorescence detecting apparatus |
Yusaku Ito, Junichi Kuki |
2018-06-05 |
| 9976951 |
Protective film detecting method |
Yusaku Ito, Tomoaki Endo, Yukinobu Ohura, Kentaro Odanaka |
2018-05-22 |
| 9847257 |
Laser processing method |
Yukinobu Ohura |
2017-12-19 |
| 9748119 |
Wafer processing method |
Hirokazu Matsumoto, Toshiyuki Yoshikawa, Yukinobu Ohura |
2017-08-29 |
| 9689798 |
Protective film detecting method for laser processing |
Yukinobu Ohura |
2017-06-27 |
| 9620355 |
Wafer processing method |
Hirokazu Matsumoto, Toshiyuki Yoshikawa, Yukinobu Ohura |
2017-04-11 |
| 9613415 |
Protective film detecting apparatus and protective film detecting method |
Yu KUDO, Yusaku Ito, Tomoaki Endo, Yukinobu Ohura, Ayana Nakanishi +1 more |
2017-04-04 |