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2019-11-26 |
| 10242904 |
Transfer apparatus, processing apparatus, and transfer method |
Masahiro Tsukamoto |
2019-03-26 |
| 10094951 |
Determining apparatus for determining object stored in cassette |
Masahiro Tsukamoto |
2018-10-09 |
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Chuck table |
— |
2018-10-02 |
| 9517962 |
Plate-shaped object processing method |
Noboru Takeda, Hiroshi Morikazu, Xiaoming Qiu, Fumiteru Tashino |
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Laser processing apparatus |
Keiji Nomaru, Hiroshi Morikazu |
2013-03-26 |
| 6494197 |
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Eiichi Yoshimura, Shinichi Namioka |
2002-12-17 |
| 5521495 |
Sensor for contactless determination of an angle of rotation of a rotatable structural element |
Hajime Takahashi, Wataru Nagasaki, Kazuhiko Shimoda |
1996-05-28 |