Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7059190 | Semiconductor dynamic sensor having variable capacitor formed on laminated substrate | Tameharu Ohta | 2006-06-13 |
| 7007550 | Semiconductor dynamic quantity sensor | Takashi Katsumata | 2006-03-07 |
| 7004029 | Semiconductor dynamic quantity sensor | — | 2006-02-28 |
| 6990864 | Semiconductor dynamic quantity sensor | — | 2006-01-31 |
| 6984541 | Method of manufacturing capacitive type dynamic quantity sensor | — | 2006-01-10 |
| 6973829 | Semiconductor dynamic quantity sensor with movable electrode and fixed electrode supported by support substrate | Yoshiyuki Kato, Minoru Murata | 2005-12-13 |
| 6973844 | Semiconductor mechanical quantity sensor | — | 2005-12-13 |
| 6906394 | Method of manufacturing semiconductor device capable of sensing dynamic quantity | Hiroshi Muto, Tsuyoshi Fukada, Kenichi Ao, Yukihiro Takeuchi, Kazuhiko Kano +1 more | 2005-06-14 |
| 6848309 | Capacitive type dynamic quantity sensor | — | 2005-02-01 |
| 6841840 | Capacitive dynamic quantity sensor | — | 2005-01-11 |
| 6792805 | Capacitive acceleration sensor | Minoru Murata | 2004-09-21 |
| 6785117 | Capacitive device | Toshiyuki Tsuchiya, Hirofumi Funabashi, Norio Fujitsuka, Yasuichi Mitsushima | 2004-08-31 |
| 6753201 | Method of manufacturing semiconductor device capable of sensing dynamic quantity | Hiroshi Muto, Tsuyoshi Fukada, Kenichi Ao, Yukihiro Takeuchi, Kazuhiko Kano +1 more | 2004-06-22 |
| 6672161 | Semiconductor dynamic quantity sensor | Yoshiyuki Kato | 2004-01-06 |
| 6591678 | Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion | — | 2003-07-15 |
| 6525400 | Semiconductor memory device and method of manufacturing the same | Tetsuo Fujii, Akira Kuroyanagi | 2003-02-25 |
| 6508126 | Dynamic quantity sensor having movable and fixed electrodes with high rigidity | Seiki Aoyama, Hirotsugu Funato | 2003-01-21 |
| 6502462 | Capacitance type dynamic quantity sensor having displacement portion and formed by wire bonding | — | 2003-01-07 |
| 6494096 | Semiconductor physical quantity sensor | Minoru Murata | 2002-12-17 |
| 6450031 | Semiconductor physical quantity sensor | Minoru Murata, Seiki Aoyama, Youko Nakagawa | 2002-09-17 |
| 6450029 | Capacitive physical quantity detection device | Shinji Yoshihara | 2002-09-17 |
| 6444543 | Semiconductor sensor device and method of manufacturing the same | Hiroshige Sugito, Hiroshi Muto, Motoki Ito, Tsuyoshi Fukada | 2002-09-03 |
| 6430999 | Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove | Minoru Murata | 2002-08-13 |
| 6423563 | Method for manufacturing semiconductor dynamic quantity sensor | Tsuyoshi Fukada, Minoru Murata, Yukihiro Takeuchi, Seiki Aoyama | 2002-07-23 |
| 6388279 | Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof | Toshimasa Yamamoto, Yasutoshi Suzuki, Kenichi Yokoyama, Masakazu Terada, Eishi Kawasaki +1 more | 2002-05-14 |