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Semiconductor sensor device and method of manufacturing the same |
Minekazu Sakai, Hiroshi Muto, Motoki Ito, Tsuyoshi Fukada |
2002-09-03 |
| 6287885 |
Method for manufacturing semiconductor dynamic quantity sensor |
Hiroshi Muto, Tsuyoshi Fukada, Masakazu Terada, Masakazu Kanosue, Shinji Yoshihara +8 more |
2001-09-11 |
| 6151966 |
Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure |
Minekazu Sakai, Yukihiro Takeuchi, Kazuhiko Kano, Seiji Fujino, Tsuyoshi Fukada +4 more |
2000-11-28 |
| 5869876 |
Semiconductor strain sensor |
Seiichiro Ishio, Kenichi Ao |
1999-02-09 |
| 5654244 |
Process for producing semiconductor strain-sensitive sensor |
Minekazu Sakai, Tsuyoshi Fukada |
1997-08-05 |
| 5643803 |
Production method of a semiconductor dynamic sensor |
Tsuyoshi Fukada, Yoshimi Yoshino, Minekazu Sakai |
1997-07-01 |
| 5408112 |
Semiconductor strain sensor having improved resistance to bonding strain effects |
Akira Tai, Toshitaka Yamada, Yoshinori Fujihashi, Tsuyoshi Fukada, Hirohito Shioya +1 more |
1995-04-18 |