| 9444032 |
Piezoelectric element and method of producing the same |
Noriyuki Matsushita, Makoto Ishida, Daisuke Akai |
2016-09-13 |
| 9074996 |
Liquid component sensor |
Shuichi Yamashita, Takayuki Matsui, Atsushi Miura |
2015-07-07 |
| 9070666 |
Semiconductor device including cooler |
Kuniaki Mamitsu, Takahisa Kaneko, Masaya Tonomoto, Masayoshi Nishihata, Chikage Noritake +2 more |
2015-06-30 |
| 8994955 |
Fabry-Perot interferometer |
Tomoki TANEMURA, Shuichi Yamashita, Yukihiro Takeuchi |
2015-03-31 |
| 8957517 |
Semiconductor device including cooler |
Kuniaki Mamitsu, Takahisa Kaneko, Masaya Tonomoto, Masayoshi Nishihata, Chikage Noritake +2 more |
2015-02-17 |
| 8884426 |
Semiconductor device including cooler |
Kuniaki Mamitsu, Takahisa Kaneko, Masaya Tonomoto, Masayoshi Nishihata, Chikage Noritake +2 more |
2014-11-11 |
| 8558375 |
Semiconductor package cooled by grounded cooler |
Kuniaki Mamitsu, Takahisa Kaneko, Masaya Tonomoto, Masayoshi Nishihata, Chikage Noritake +2 more |
2013-10-15 |
| 8497572 |
Semiconductor module and method of manufacturing the same |
Keita FUKUTANI, Kuniaki Mamitsu, Yasushi Ookura, Masayoshi Nishihata, Syun Sugiura |
2013-07-30 |
| 7807061 |
Optical gas concentration detector and method of producing structure used in the detector |
Kazuhiko Kanoh |
2010-10-05 |
| 7733495 |
Optical multilayer mirror and fabry-perot interferometer having the same |
Megumi Suzuki, Takahiko Yoshida |
2010-06-08 |
| 7730785 |
Ultrasonic sensor and manufacture method of the same |
Makiko Sugiura |
2010-06-08 |
| 6983653 |
Flow sensor having thin film portion and method for manufacturing the same |
Takao Iwaki, Toshimasa Yamamoto, Kiyokazu Isomura, Tomoyuki Mizutani, Akihiko Teshigahara +1 more |
2006-01-10 |
| 6938473 |
Apparatus for measuring flow amount |
Takao Iwaki, Toshiyuki Morishita, Yasushi Kohno, Yasushi Goka, Makoto Tsunekawa +2 more |
2005-09-06 |
| 6768291 |
Fluid flow sensor and method of fabricating the same |
Toshiki Isogai, Yasushi Kohno, Toshimasa Yamamoto |
2004-07-27 |
| 6705160 |
Flow sensor |
Takao Iwaki, Toshimasa Yamamoto |
2004-03-16 |
| 6701782 |
Flow sensor |
Takao Iwaki, Toshimasa Yamamoto, Yukihiro Takeuchi |
2004-03-09 |
| 6698283 |
Thin film sensor, method of manufacturing thin film sensor, and flow sensor |
Takao Iwaki |
2004-03-02 |
| 6694811 |
Flow meter having airflow sensor |
Yasushi Kohno, Toshimasa Yamamoto, Tetsuo Yoshioka |
2004-02-24 |
| 6626037 |
Thermal flow sensor having improved sensing range |
Yukihiro Takeuchi, Toshimasa Yamamoto |
2003-09-30 |
| 6602428 |
Method of manufacturing sensor having membrane structure |
Makiko Sugiura, Toshimasa Yamamoto, Yukihiro Takeuchi, Yasushi Kohno |
2003-08-05 |
| 6450025 |
Micro-heater and airflow sensor using the same |
Yoshinori Otsuka, Eishi Kawasaki |
2002-09-17 |