Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9586812 | Device with vertically integrated sensors and method of fabrication | Matthieu Lagouge | 2017-03-07 |
| 9359192 | Microelectromechanical systems (MEMS) devices with control circuits and methods of fabrication | Philip H. Bowles, Vijay Sarihan | 2016-06-07 |
| 7807550 | Method of making MEMS wafers | Luc Ouellet | 2010-10-05 |