Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723664 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Hideki Matsumura, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi, Shuji Nomura +2 more | 2004-04-20 |
| 6703254 | Method for manufacturing semiconductor laser device | Kimihiko Saitoh, Hideki Matsumura | 2004-03-09 |
| 6669808 | Substrate processing apparatus and substrate processing method | Hideki Adachi, Katsuhiko Miya, Itsuki Kajino | 2003-12-30 |
| 6446646 | Substrate processing apparatus | — | 2002-09-10 |
| 6349669 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Hideki Matsumura, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi, Shuji Nomura +2 more | 2002-02-26 |
| 6077321 | Wet/dry substrate processing apparatus | Hideki Adachi | 2000-06-20 |
| 6069094 | Method for depositing a thin film | Hideki Matsumura, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi, Shuji Nomura +2 more | 2000-05-30 |
| D418117 | Computer | Adam Wade, Hideto Iwamoto | 1999-12-28 |
| 5927303 | Substrate processing apparatus | Katsuhiko Miya | 1999-07-27 |
| 5927306 | Ultrasonic vibrator, ultrasonic cleaning nozzle, ultrasonic cleaning device, substrate cleaning device, substrate cleaning treatment system and ultrasonic cleaning nozzle manufacturing method | Tetsuo Kawakatsu | 1999-07-27 |
| 5916366 | Substrate spin treating apparatus | Tsutomu Ueyama, Hideki Adachi | 1999-06-29 |
| 5571375 | Method of removing native oxide film from a contact hole on silicon wafer | Takeshi Matsuka | 1996-11-05 |
| 5520857 | Liquid agent evaporator | Tsuyoshi Matsuka, Tsutomu Takeuchi | 1996-05-28 |
| 5495792 | Double acting hydraulic cylinder with improved lubrication and piston rod guides | Toshiyuki Takeuchi | 1996-03-05 |
| 5333701 | Instrument panel for industrial vehicle | — | 1994-08-02 |
| 5112437 | Oxide film removing apparatus and removing method thereof using azeotropic vapor mixture | Nobuatsu Watanabe, Yong-Bo Chong, Toshio Tatsuno, Tomoyoshi Okada, Keiji Toei | 1992-05-12 |
| 5022961 | Method for removing a film on a silicon layer surface | Keiji Toei, Nobuatsu Watanabe, Yong-Bo Chong | 1991-06-11 |
| 4877909 | Process for reducing aldehydes or ketones | Sigenobu Mizusaki, Hajime Matsushita, Shigeo Ishiguro, Hiroshi Ichinose | 1989-10-31 |
| 4846499 | Devices for supporting an LPG tank bracket of an LPG fork lift | Ichiro Nagasaka | 1989-07-11 |
| 4840417 | Movable yoke-type lifting magnet device | Tomomi Kishi, Hideo Niwa | 1989-06-20 |
| 4788584 | RF transistor package with capacitor | Yutaka Hirano, Masanobu Itoh, Yoshikazu Dooi | 1988-11-29 |