Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7190707 | Gas discharge laser light source beam delivery unit | Palash P. Das, Gregory Francis, Holger Glatzel, Alexei Lukashev, Jeremy Tyler +1 more | 2007-03-13 |
| 7139301 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom +1 more | 2006-11-21 |
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom +1 more | 2003-12-30 |