Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7838854 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more | 2010-11-23 |
| 7405416 | Method and apparatus for EUV plasma source target delivery | J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more | 2008-07-29 |