Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078936 | Magnification adjustable projection system using deformable lens plates | Robert Dennis Grejda, Brian Monroe McMaster | 2024-09-03 |
| 11340383 | Hydroxide-catalysis bonding of optical components used in DUV optical systems | Michael Morgan Dunn, Todd Robert McMichael, Mark Westcott | 2022-05-24 |
| 11280978 | Methods of aligning a cylindrical lens in a lens fixture and in an optical system | Michael Morgan Dunn, Kevin J. Magierski, Brian Monroe McMaster, Duncan Christopher Spaulding | 2022-03-22 |
| 10732336 | Method of assembling optical systems and minimizing retardance distortions in optical assemblies | Paul G. Dewa, Robert Dennis Grejda, Stephen Karl Mack, Robert Louis Michaels, Duncan Christopher Spaulding | 2020-08-04 |
| 10488176 | Edge registration for interferometry | Thomas J. Dunn | 2019-11-26 |
| 10228799 | Pressure sensing touch systems and methods | Minghan Chen, Jacques Gollier, Ming-Jun Li, William James Miller, Daniel Aloysius Nolan | 2019-03-12 |
| 9851557 | Optical systems including lens assemblies and methods of imaging fields of view using such optical systems | Mark Christian Sanson, Clair Theodore Tienvieri | 2017-12-26 |
| 9482790 | Silica-modified-fluoride broad angle anti-reflection coatings | Michael Jerome Cangemi, Paul G. Dewa, Joseph D. Malach, Horst Schreiber, Jue Wang | 2016-11-01 |
| 8922750 | Magnification control for lithographic imaging system | Robert Dennis Grejda | 2014-12-30 |
| 8830581 | Broadband polarization switching | Paul G. Dewa, Michael Morgan Dunn, Stephen Karl Mack, Brian Monroe McMaster, Robert Louis Michaels | 2014-09-09 |
| 8755122 | Laser pulse stretching unit and method for using same | Mark Christian Sanson, Daniel Max Staloff, Clair Theodore Tienvieri | 2014-06-17 |
| 8724203 | Variable pulse stretching length by variable beamsplitter reflectivity | Mark Christian Sanson | 2014-05-13 |
| 8525972 | Optimization of focused spots for maskless lithography | — | 2013-09-03 |
| 8421997 | Active spot array lithographic projector system with regulated spots | — | 2013-04-16 |
| 8314922 | Telecentricity corrector for microlithographic projection system | Jim D Cornell, Joseph D. Malach, James E. Webb | 2012-11-20 |
| 8283554 | Method and apparatus for concentrating light | John H. Bruning, Joshua Monroe Cobb | 2012-10-09 |
| 8115904 | Illumination system for sizing focused spots of a patterning system for maskless lithography | Joshua Monroe Cobb | 2012-02-14 |
| 7248769 | Optical fiber bundles and devices including them | — | 2007-07-24 |
| 6191887 | Laser illumination with speckle reduction | Bryan D. Stone | 2001-02-20 |
| 5757470 | Variable annular illuminator for photolithographic projection imager | Paul G. Dewa, Paul Jay Tompkins, William N. Partlo | 1998-05-26 |
| 5719676 | Diffraction management for grazing incidence interferometer | Andrew W. Kulawiec | 1998-02-17 |
| 5650877 | Imaging system for deep ultraviolet lithography | Anthony R. Phillips, Jr. | 1997-07-22 |
| 5461456 | Spatial uniformity varier for microlithographic illuminator | — | 1995-10-24 |
| 5452054 | Variable annular illuminator for photolithographic projection imager | Paul G. Dewa, Paul Jay Tompkins, William N. Partlo | 1995-09-19 |
| 5383000 | Partial coherence varier for microlithographic system | William N. Partlo | 1995-01-17 |