Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650877 | Imaging system for deep ultraviolet lithography | Paul Francis Michaloski | 1997-07-22 |
| 5353322 | Lens system for X-ray projection lithography camera | John H. Bruning, David Shafer, Alan D. White | 1994-10-04 |
| 5220590 | X-ray projection lithography camera | John H. Bruning, David Shafer, Alan D. White | 1993-06-15 |