Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9556074 | Method for manufacture of a multi-layer plate device | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2017-01-31 |
| 9315424 | Multi-layer plate device | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2016-04-19 |
| 8932690 | Plate and shaft device | Alfred Grant Elliot, Dennis George Rex, Alexander Veytser, Frank Balma, Richard Erich Schuster | 2015-01-13 |
| 8789743 | Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2014-07-29 |
| 8684256 | Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veyster | 2014-04-01 |
| 7098428 | System and method for an improved susceptor | Frank Balma, Alexander Veytser, Benjamin D. Mosser, Harold Mortensen | 2006-08-29 |
| 6302141 | Building blocks for integrated gas panel | Jeffrey R. Markulec, Dennis George Rex, Richard Erich Schuster | 2001-10-16 |
| 6231260 | Mounting plane for integrated gas panel | Jeffrey R. Markulec, Dennis George Rex, Richard Erich Schuster | 2001-05-15 |
| 5836355 | Building blocks for integrated gas panel | Jeffrey R. Markulec, Dennis George Rex, Richard Erich Schuster | 1998-11-17 |
| 5605179 | Integrated gas panel | Benjamin R. Strong, Jr., Frank Balma | 1997-02-25 |
| 5178651 | Method for purifying gas distribution systems | Frank Balma | 1993-01-12 |