Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6156654 | Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices | Chaw Sing Ho, Chan Lap, Yong Lu, R. P.G. Karunasiri | 2000-12-05 |
| 6121130 | Laser curing of spin-on dielectric thin films | Chee Tee Chua, Mei Sheng Zhou, Lap Chan | 2000-09-19 |
| 6009888 | Photoresist and polymer removal by UV laser aqueous oxidant | Jian Ye, Mei Sheng Zhou, Yong Lu | 2000-01-04 |