Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7078333 | Method to improve adhesion of dielectric films in damascene interconnects | Luona Goh, Simon Chooi, Siew Lok Toh | 2006-07-18 |
| 6797605 | Method to improve adhesion of dielectric films in damascene interconnects | Luona Goh, Simon Chooi, Siew Lok Toh | 2004-09-28 |
| 6513374 | Apparatus to quantify the adhesion of film | Loh Nah Luona Goh, Siew Lok Toh, Simon Chooi | 2003-02-04 |