Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9533268 | Method and apparatus for supplying mixed gas | Kunihiko Koike, Yu Yoshino, Naohisa Makihira, Takehiko Senoo, Toshihiro Aida +2 more | 2017-01-03 |
| 5808149 | Method for producing high-purity fluoroalkylsulfonic acid anhydride | Tamio Nakamura, Yasushi Kita, Shoji Okabayashi, Seigo Okamura | 1998-09-15 |
| 4964137 | Method of refining rare gas fluoride excimer laser gas | Minoru Aramaki, Shinsuke Nakagawa, Hisaji Nakano, Hiroshi Ichimura | 1990-10-16 |