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Harmut Enkisch

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
Overall (All Time): #3,036,901 of 4,157,543Top 75%
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Patent #TitleCo-InventorsDate
8944615 Projection objective and method for its manufacture Hans-Juergen Mann, Stephan Muellender, Johann Trenkler 2015-02-03