Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128429 | Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device | Ulrich Korten, Juergen Anic | 2018-11-13 |
| 10078271 | Optical component | Severin Waldis, Matthias Orth, Roger Marc Bostock, Jian Deng, Sebastian Lani +1 more | 2018-09-18 |
| 10061202 | Methods and devices for driving micromirrors | Jan Horn | 2018-08-28 |
| 10025203 | Method and arrangement for actuating an element | Gerald Rothenhoefer | 2018-07-17 |
| 9767068 | Microlithographic projection exposure apparatus | — | 2017-09-19 |
| 9348232 | Illumination system for a microlithographic projection exposure apparatus | Jan Horn, Wolfgang Fallot-Burghardt | 2016-05-24 |
| 8345224 | Methods and devices for driving micromirrors | Jan Horn | 2013-01-01 |