Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11210861 | Method for adjusting and visualizing parameters for focusing an objective lens on an object and system for implementing the method | Benedikt Hartmann, Christoph Stark | 2021-12-28 |
| 11175567 | Objective lens main body, objective lens, and objective lens system | Jochen Franke | 2021-11-16 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2021-06-29 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2019-12-24 |