Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7846346 | Processing apparatus and method | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi | 2010-12-07 |
| 7815424 | Imprinting machine and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi | 2010-10-19 |
| 7815425 | Processing apparatus | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Kazuyuki Kasumi | 2010-10-19 |
| 7807065 | Processing method | Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi | 2010-10-05 |
| 7789647 | Processing apparatus and method | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi | 2010-09-07 |
| 7751028 | Exposure apparatus and method | — | 2010-07-06 |
| 7690912 | Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same | Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi, Takashi Nakamura | 2010-04-06 |
| 7528930 | Exposure apparatus and device manufacturing method | — | 2009-05-05 |
| 7468780 | Exposure apparatus and method | — | 2008-12-23 |
| 7381272 | Processing apparatus | Kazuyuki Kasumi, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura | 2008-06-03 |
| 7236231 | Exposure apparatus and device manufacturing method | Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi | 2007-06-26 |
| 7233383 | Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Kazuyuki Kasumi | 2007-06-19 |
| 7227615 | Exposure apparatus and method | — | 2007-06-05 |
| 7224434 | Exposure method | — | 2007-05-29 |
| 7196321 | Fine pattern forming apparatus and fine pattern inspecting apparatus | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi | 2007-03-27 |
| 7180575 | Exposure apparatus and device manufacturing method | Kazuyuki Kasumi, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura | 2007-02-20 |
| 7177006 | Exposure apparatus and method | — | 2007-02-13 |
| 7053983 | Liquid immersion type exposure apparatus | — | 2006-05-30 |
| 6972844 | Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method | — | 2005-12-06 |
| 6876438 | Semiconductor exposure apparatus, control method therefor, and semiconductor device manufacturing method | — | 2005-04-05 |
| 6836316 | Substrate holding apparatus and exposure apparatus using the same | — | 2004-12-28 |
| 6804323 | Mask pattern magnification correction method, magnification correction apparatus, and mask structure | Akira Moriya, Takeshi Miyachi, Shinichi Hara | 2004-10-12 |
| 6559927 | Gap adjusting method in exposure apparatus | Yutaka Tanaka | 2003-05-06 |
| 5959304 | Semiconductor exposure apparatus | Yuji Chiba, Yutaka Tanaka | 1999-09-28 |