Issued Patents All Time
Showing 76–100 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428620 | Substrate processing method and apparatus and SOI substrate | Kenji Yamagata | 2002-08-06 |
| 6429095 | Semiconductor article and method of manufacturing the same | Takao Yonehara | 2002-08-06 |
| 6427747 | Apparatus and method of separating sample and substrate fabrication method | Kazuaki Omi, Takao Yonehara, Kazutaka Yanagita | 2002-08-06 |
| 6427748 | Sample processing apparatus and method | Kazutaka Yanagita, Takao Yonehara, Kazuaki Omi | 2002-08-06 |
| 6426270 | Substrate processing method and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Kazutaka Yanagita | 2002-07-30 |
| 6418999 | Sample separating apparatus and method, and substrate manufacturing method | Kazutaka Yanagita, Takao Yonehara, Kazuaki Omi | 2002-07-16 |
| 6417069 | Substrate processing method and manufacturing method, and anodizing apparatus | Satoshi Matsumura, Kenji Yamagata | 2002-07-09 |
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Takao Yonehara, Kazuaki Ohmi, Shoji Nishida, Kazutaka Yanagita | 2002-05-21 |
| 6391067 | Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus | Kazutaka Yanagita | 2002-05-21 |
| 6382292 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kazutaka Yanagita | 2002-05-07 |
| 6380099 | Porous region removing method and semiconductor substrate manufacturing method | Kazutaka Yanagita | 2002-04-30 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazutaka Yanagita, Kazuaki Ohmi, Hirokazu Kurisu | 2002-04-23 |
| 6350702 | Fabrication process of semiconductor substrate | Takao Yonehara | 2002-02-26 |
| 6350703 | Semiconductor substrate and production method thereof | Nobuhiko Sato | 2002-02-26 |
| 6342433 | Composite member its separation method and preparation method of semiconductor substrate by utilization thereof | Kazuaki Ohmi, Kazutaka Yanagita | 2002-01-29 |
| 6337030 | Wafer processing apparatus, wafer processing method, and SOI wafer fabrication method | — | 2002-01-08 |
| 6331208 | Process for producing solar cell, process for producing thin-film semiconductor, process for separating thin-film semiconductor, and process for forming semiconductor | Shoji Nishida, Takao Yonehara, Masaaki Iwane | 2001-12-18 |
| 6313014 | Semiconductor substrate and manufacturing method of semiconductor substrate | Nobuhiko Sato | 2001-11-06 |
| 6306729 | Semiconductor article and method of manufacturing the same | Takao Yonehara | 2001-10-23 |
| 6294478 | Fabrication process for a semiconductor substrate | Takao Yonehara | 2001-09-25 |
| 6258698 | Process for producing semiconductor substrate | Yukiko Iwasaki, Katsumi Nakagawa, Takao Yonehara, Shoji Nishida | 2001-07-10 |
| 6254794 | Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution | Takao Yonehara, Nobuhiko Sato | 2001-07-03 |
| 6246068 | Semiconductor article with porous structure | Nobuhiko Sato, Takao Yonehara | 2001-06-12 |
| 6238586 | Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution | Takao Yonehara, Nobuhiko Sato | 2001-05-29 |
| 6221738 | Substrate and production method thereof | Nobuhiko Sato | 2001-04-24 |