Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6250251 | Vacuum processing apparatus and vacuum processing method | Kazuyoshi Akiyama, Tatsuyuki Aoike, Toshiyasu Shirasuna, Hitoshi Murayama, Takashi Otsuka +1 more | 2001-06-26 |
| 6155201 | Plasma processing apparatus and plasma processing method | Hitoshi Murayama, Toshiyasu Shirasuna, Ryuji Okamura, Kazuyoshi Akiyama, Takashi Ohtsuka | 2000-12-05 |