| 7381648 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Shumin Wang |
2008-06-03 |
| 7354530 |
Chemical mechanical polishing systems and methods for their use |
Shumin Wang |
2008-04-08 |
| 6867140 |
Method of polishing a multi-layer substrate |
Shumin Wang, Steven Grumbine, Isaac K. Cherian |
2005-03-15 |
| 6855266 |
Polishing system with stopping compound and method of its use |
Shumin Wang, Steven Grumbine, Isaac K. Cherian |
2005-02-15 |
| 6852632 |
Method of polishing a multi-layer substrate |
Shumin Wang, Steven Grumbine, Isaac K. Cherian, Renjie Zhou |
2005-02-08 |
| 6840971 |
Chemical mechanical polishing systems and methods for their use |
Shumin Wang |
2005-01-11 |
| 6620037 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Slumin Wang |
2003-09-16 |
| 6593239 |
Chemical mechanical polishing method useful for copper substrates |
Rodney Kistler |
2003-07-15 |
| 6569350 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Shumin Wang |
2003-05-27 |
| 6432828 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Shumin Wang |
2002-08-13 |
| 6362106 |
Chemical mechanical polishing method useful for copper substrates |
Rodney Kistler, Shumin Wang |
2002-03-26 |
| 6316366 |
Method of polishing using multi-oxidizer slurry |
Shumin Wang |
2001-11-13 |
| 6309560 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Shumin Wang |
2001-10-30 |
| 6217416 |
Chemical mechanical polishing slurry useful for copper/tantalum substrates |
Rodney Kistler, Shumin Wang |
2001-04-17 |
| 6126853 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler, Shumin Wang |
2000-10-03 |
| 6063306 |
Chemical mechanical polishing slurry useful for copper/tantalum substrate |
Rodney Kistler, Shumin Wang |
2000-05-16 |
| 6039891 |
Multi-oxidizer precursor for chemical mechanical polishing |
Shumin Wang |
2000-03-21 |
| 6033596 |
Multi-oxidizer slurry for chemical mechanical polishing |
Shumin Wang |
2000-03-07 |
| 5954997 |
Chemical mechanical polishing slurry useful for copper substrates |
Rodney Kistler |
1999-09-21 |
| 5858813 |
Chemical mechanical polishing slurry for metal layers and films |
Debra L. Scherber, Rodney Kistler, Brian L. Mueller, Christopher C. Streinz |
1999-01-12 |
| 5783489 |
Multi-oxidizer slurry for chemical mechanical polishing |
Shumin Wang |
1998-07-21 |