Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5925887 | Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same | Fumio Sakai, Kazuhito Outsuka, Yuichi Yamada, Kazuhiro Takahashi, Yasuo Hasegawa +1 more | 1999-07-20 |
| 4962423 | Mark detecting method and apparatus | Yuichi Yamada, Naoki Ayata, Hiroki Suzukawa | 1990-10-09 |
| 4933715 | Method of detecting position of a mark | Yuichi Yamada, Naoki Ayata, Hiroki Suzukawa | 1990-06-12 |