Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8403613 | Bypass thermal adjuster for vacuum semiconductor processing | — | 2013-03-26 |
| 8313277 | Semiconductor manufacturing process modules | Christopher C. Kiley, Patrick D. Pannese | 2012-11-20 |
| 8267632 | Semiconductor manufacturing process modules | Christopher C. Kiley, Patrick D. Pannese | 2012-09-18 |
| 8270702 | Wafer center finding with a Kalman filter | Christopher C. Kiley, Forrest Buzan, Paul E. Fogel | 2012-09-18 |
| 8253948 | Wafer center finding with charge-coupled devices | Christopher C. Kiley, Forrest Buzan, Paul E. Fogel | 2012-08-28 |
| 8197177 | Semiconductor wafer handling and transport | Christopher C. Kiley, Patrick D. Pannese, Raymond S. Ritter, Thomas A. Schaefer | 2012-06-12 |
| 8178829 | Wafer prescence detector with end effectors having optical couplers and fibers | Paul E. Fogel | 2012-05-15 |
| 8125652 | Wafer center finding with charge-coupled devices | Paul E. Fogel, Forrest Buzan, Christopher C. Kiley | 2012-02-28 |
| 8029225 | Stacked process modules for a semiconductor handling system | — | 2011-10-04 |
| 8029226 | Semiconductor manufacturing systems | — | 2011-10-04 |
| 7988399 | Mid-entry load lock for semiconductor handling system | — | 2011-08-02 |
| 7959403 | Linear semiconductor processing facilities | — | 2011-06-14 |
| 7945348 | Methods and systems for controlling a semiconductor fabrication process | Patrick D. Pannese, Vinaya Kavathekar | 2011-05-17 |
| 7899562 | Methods and systems for controlling a semiconductor fabrication process | Patrick D. Pannese, Vinaya Kavathekar | 2011-03-01 |
| 7894657 | Wafer center finding | Forrest Buzan | 2011-02-22 |
| 7792350 | Wafer center finding | Chris Kiley, Forest Buzan, Paul E. Fogel | 2010-09-07 |
| 7769482 | Methods and systems for controlling a semiconductor fabrication process | Patrick D. Pannese, Vinaya Kavathekar | 2010-08-03 |
| 7677859 | Substrate loading and uploading station with buffer | Ulysses Gilchrist, David Beaulieu | 2010-03-16 |
| 7458763 | Mid-entry load lock for semiconductor handling system | — | 2008-12-02 |
| 7422406 | Stacked process modules for a semiconductor handling system | — | 2008-09-09 |
| 7210246 | Methods and systems for handling a workpiece in vacuum-based material handling system | — | 2007-05-01 |
| 6719517 | Substrate processing apparatus with independently configurable integral load locks | David Beaulieu, Douglas R. Adams, Mitchell Drew | 2004-04-13 |
| 6585470 | System for transporting substrates | — | 2003-07-01 |
| 6438404 | Magnetic resonance method and device for measuring a periodically varying fluid flow in an object | Johan Samuel Van Den Brink | 2002-08-20 |
| 6257827 | Apparatus and method for transporting substrates | Ruth Ann Hendrickson | 2001-07-10 |