Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE41128 | Organic anti-reflective coating compositions for advanced microlithography | — | 2010-02-16 |
| RE40920 | Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers | Gu Xu, Jimmy D. Meador, Mandar Bhave, Kelly A. Nowak | 2009-09-22 |
| 7132216 | Non-aromatic chromophores for use in polymer anti-reflective coatings | Xie Shao, Robert Christian Cox, Tony D. Flaim, Rama Puligadda | 2006-11-07 |
| 6962769 | Anti-reflective coating composition with improved spin bowl compatibility | Xie Shao, Jim D. Meador, Mandar Bhave, Vandana Krishnamurthy, Kelly A. Nowak +1 more | 2005-11-08 |
| 6894104 | Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers | Gu Xu, Jimmy D. Meador, Mandar Bhave, Kelly A. Nowak | 2005-05-17 |
| 6846612 | Organic anti-reflective coating compositions for advanced microlithography | — | 2005-01-25 |
| 6555287 | Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings | — | 2003-04-29 |