Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878248 | Method of manufacturing an object in a vacuum recipient | Hans Signer, Eduard Kugler, Helmut Rudigier, Walter Haag | 2005-04-12 |
| 6248219 | Process and apparatus for sputter etching or sputter coating | Urs Wegmann, Karl Hoefler | 2001-06-19 |
| 6176979 | Method of manufacturing an object in a vacuum recipient | Hans Signer, Eduard Kugler, Helmut Rudigier, Walter Haag | 2001-01-23 |
| 6149783 | Vacuum treatment apparatus | Hans Signer, Eduard Kugler, Helmut Rudigier, Walter Haag | 2000-11-21 |
| 5948224 | Method of controlling a treatment process and vacuum treatment apparatus | Hans Signer, Eduard Kugler, Helmut Rudigier, Walter Haag | 1999-09-07 |
| 5460707 | Etching or coating method and a plant therefor | — | 1995-10-24 |
| 5064522 | Feed through for application of HF energy | — | 1991-11-12 |