Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248219 | Process and apparatus for sputter etching or sputter coating | Klaus Wellerdieck, Urs Wegmann | 2001-06-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248219 | Process and apparatus for sputter etching or sputter coating | Klaus Wellerdieck, Urs Wegmann | 2001-06-19 |