Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248219 | Process and apparatus for sputter etching or sputter coating | Klaus Wellerdieck, Karl Hoefler | 2001-06-19 |
| 5343112 | Cathode arrangement | Albert Koller | 1994-08-30 |
| 5277938 | Method for controlling evaporation for vapor deposition | Albert Koller, Josef Vogt | 1994-01-11 |
| 5159234 | Electron beam generator and emission cathode | Albert Koller, Hubert Mannhart | 1992-10-27 |
| 5041712 | Method for the control of an evaporation process | Albert Koller | 1991-08-20 |
| 5039913 | Method for the cooling of targets as well as cooling device for targets | Walter Haag | 1991-08-13 |
| 5038044 | Method and device for the deflection of a beam | Albert Koller | 1991-08-06 |
| 5021669 | Process and system for the control of the focusing of a beam of monopolar charged particles | Albert Koller | 1991-06-04 |
| 5003151 | Method and control arrangement for the evaporation rate of an electron beam | Signer Hans, Albert Koller | 1991-03-26 |
| 4983269 | Method for erosion detection of a sputtering target and target arrangement | — | 1991-01-08 |
| 4748935 | Vapor source for vacuum coating installation | — | 1988-06-07 |
| 4622121 | Apparatus for coating materials by cathode sputtering | Eduard Rille | 1986-11-11 |
| 4448653 | Cathode arrangement for sputtering material from a target in a cathode sputtering unit | — | 1984-05-15 |