Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878248 | Method of manufacturing an object in a vacuum recipient | Eduard Kugler, Klaus Wellerdieck, Helmut Rudigier, Walter Haag | 2005-04-12 |
| 6176979 | Method of manufacturing an object in a vacuum recipient | Eduard Kugler, Klaus Wellerdieck, Helmut Rudigier, Walter Haag | 2001-01-23 |
| 6149783 | Vacuum treatment apparatus | Eduard Kugler, Klaus Wellerdieck, Helmut Rudigier, Walter Haag | 2000-11-21 |
| 5948224 | Method of controlling a treatment process and vacuum treatment apparatus | Eduard Kugler, Klaus Wellerdieck, Helmut Rudigier, Walter Haag | 1999-09-07 |
| 5852275 | Heating system, vacuum process chamber comprising such a heating system and operation of such a vacuum process chamber | — | 1998-12-22 |
| 4334720 | Split-inner-ring ball bearing with lubrication structure | — | 1982-06-15 |
| 4279216 | Cathode shielded coating apparatus | Rainer Buhl | 1981-07-21 |