Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607543 | Integrated circuit etching | Susan Clay Vitkavage | 1997-03-04 |
| 5057462 | Compensation of lithographic and etch proximity effects | Larry Bruce Fritzinger, Chong-Cheng Fu, Taeho Kook, Thomas Wolf | 1991-10-15 |