Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387913 | Dynamic vacuum seal system for physical vapor deposition sputter applications | Rick Eller, John Rizer, Lora B. Thrun, Gary Offord | 2025-08-12 |
| 10792788 | Optimized textured surfaces and methods of optimizing | David B. Smathers, John Holeman, Justin Kyle Reed | 2020-10-06 |
| 8592307 | Modulated deposition process for stress control in thick TiN films | Gregory Herdt | 2013-11-26 |
| 8575752 | Modulated deposition process for stress control in thick TiN films | Gregory Herdt | 2013-11-05 |
| 8328585 | Modulated deposition process for stress control in thick TiN films | Gregory Herdt | 2012-12-11 |
| 7137400 | Bypass loop gas flow calibration | William Bevers, Robert Jones, Bennett Ross, James L. Flack | 2006-11-21 |
| 7033931 | Temperature optimization of a physical vapor deposition process to prevent extrusion into openings | Maxwell Lippitt, Craig Clabough, Timothy Daniel | 2006-04-25 |
| 6720261 | Method and system for eliminating extrusions in semiconductor vias | Steven M. Anderson, Siddhartha Bhowmik, Sailesh Mansinh Merchant, Frank Minardi | 2004-04-13 |
| 6387817 | Plasma confinement shield | — | 2002-05-14 |
| 6169036 | Method for cleaning via openings in integrated circuit manufacturing | Siddhartha Bhowmik, G. Craig Clabough, Sailesh Mansinh Merchant | 2001-01-02 |
| 6136159 | Method for depositing metal | Sailesh Chittipeddi, Sailesh Mansinh Merchant | 2000-10-24 |
| 5935396 | Method for depositing metal | Sailesh Chittipeddi, Sailesh Mansinh Merchant | 1999-08-10 |
| 5807760 | Method of despositing an aluminum-rich layer | Sailesh Chittipeddi, Sailesh Mansinh Merchant | 1998-09-15 |