Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine +5 more | 2009-01-06 |