Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048174 | Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program | Michael Kubis, Marinus Jochemsen, Richard S. Wise, Nader Shamma, Girish Dixit +3 more | 2021-06-29 |