Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747125 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more | 2020-08-18 |
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more | 2018-11-06 |
| 9507275 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more | 2016-11-29 |