Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more | 2020-02-25 |
| 10317804 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more | 2019-06-11 |