Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine +5 more | 2009-01-06 |
| 5101091 | Arrangement for the guidance of a beam during the treatment of a workpiece with a laser | Robert Grub, Friedrich Paul Lindner | 1992-03-31 |