Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7520244 | Plasma treatment apparatus | Takayuki Yamagishi, Kiyoshi Satoh | 2009-04-21 |
| 7504915 | Electromagnetic relay | Yohei TAKAYAMA, Yasuhiro Takebayashi | 2009-03-17 |
| 7276123 | Semiconductor-processing apparatus provided with susceptor and placing block | Akira Shimizu, Hideaki Fukuda, Baiei Kawano, Takayuki Yamagishi | 2007-10-02 |
| 6992013 | Method of forming a fine pattern using a silicon-oxide-based film, semiconductor device with a silicon-oxide-based film and method of manufacture thereof | Ichiro Okabe | 2006-01-31 |
| 6761771 | Semiconductor substrate-supporting apparatus | Kiyoshi Satoh | 2004-07-13 |
| 6586163 | Method of forming fine pattern | Ichiro Okabe | 2003-07-01 |
| 6524955 | Method of forming thin film onto semiconductor substrate | Hideaki Fukuda | 2003-02-25 |
| 6413887 | Method for producing silicon nitride series film | Hideaki Fukuda | 2002-07-02 |
| 6187691 | Method of forming film on semiconductor substrate in film-forming apparatus | Hideaki Fukuda, Yu Yoshizaki | 2001-02-13 |