Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037780 | Method for manufacturing semiconductor device with helium-containing gas | Toshiaki Iijima, Jun Kawahara | 2021-06-15 |
| 10435790 | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap | Atsuki Fukazawa, Masaru Zaitsu, Hideaki Fukuda | 2019-10-08 |
| 9818601 | Substrate processing apparatus and method of processing substrate | Masaru Zaitsu, Atsuki Fukazawa | 2017-11-14 |